Manufacturing Techniques for Microfabrication and Nanotechnology

Original PDF نویسندگان: Marc J. Madou
جزئیات
فرمت: Original PDF صفحات: 670 pages ناشر: CRC Press تاریخ انتشار نسخه الکترونیکی : June 13, 2011
؟
شابک: 9781439895306 لینک: https://www.amazon.com/dp/B00OD4D0YC
توضیحات
Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
3,249,000 تومان زمان تحویل: حداکثر 24 ساعت