Advanced MEMS/NEMS Fabrication and Sensors Kindle Edition

Kindle Edition or EPUB + Converted PDF نویسندگان: Zhuoqing Yang
جزئیات
فرمت: Kindle Edition or EPUB + Converted PDF ناشر: Springer (October 12, 2021) تاریخ انتشار نسخه الکترونیکی : October 12, 2021
؟
شابک: 9783030797485 لینک: https://www.amazon.com/Advanced-MEMS-NEMS-Fabrication-Sensors-ebook/dp/B09JBH6QRB
توضیحات
This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development.Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors;Covers a broad spectrum of sensor applications;Written by leading experts in the field.
249,000 تومان زمان تحویل: حداکثر 24 ساعت